Various test structures can be used to determine the specific contact
resistivity of ohmic contacts. The transmission line model test
structure and circular transmission line model test structure are the
most commonly used. The analytical expressions of the former are
straightforward and effectively describe the electrical behavior of a
contact, while the concentric geometry of the latter eliminates
complications during fabrication. In this paper, we present a hybrid
test structure that combines the advantages of the transmission line and
the circular transmission line models. The analytical expressions of the
new structure are presented, and its finite-element modeling is
undertaken. The effect of contact geometry on this test structure is
also discussed. Using the presented test structure, determining contact
parameters does not require any error corrections.