Abstract
The usage of the gas sensor has been increasing very rapidly in the
industry and in daily life for various potential applications. In recent
years, metal oxide semiconductors (MOS) become the primary choice for
designing highly sensitive, stable, and low-cost real-life
applications-based gas sensors due to their inherent physical and
chemical properties. Researchers have proposed numerous sensing
mechanism to explain the functionality of MOS based gas sensors. In this
review, we have comprehensively covered different sensing mechanisms
used for MOS. We have also discussed different parameters affecting the
sensitivity and selectivity of the gas sensors. Moreover, the different
techniques used to enhance the gas sensing response of MOS based sensors
are also extensively covered. And finally, we give our prospective on
recent opportunities and challenges on future applications of MOS based
gas sensors.