Investigation and optimization of thin film lithium niobate grating
couplers with slanted sidewall
Abstract
In this letter, we investigate and analyse the effect of sidewall angle
on the performance of lithium niobate grating couplers. We proposed a
method to calculate the mode effective index of grating couplers with
slanted sidewall, and analyse the relationship between the mode
effective index with different sidewall angle under the same grating
period and etching depth. A lithium niobate grating coupler is designed
and optimized by using the proposed calculation method. A coupling
efficiency of 40% was obtained for each fiber/lithium niobate waveguide
interface. Focus ion beam etching was used to fabricate the optimized
structure. Experimental results show that the proposed method features
great accuracy for obtaining desired transmission spectrum, indicating
great potential for thin film lithium niobate platforms.