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DEPOSITION OF THE STOICHIOMETRIC COATINGS BY REACTIVE MAGNETRON SPUTTERING
Alex Sagalovich
,
Sagalovych V.V.
,
Dudnik S.F.
Alex Sagalovich
Corresponding Author:
[email protected]
Author Profile
Sagalovych V.V.
STC Nanotechnology
Dudnik S.F.
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