A high sensitivity double-roughness-structure based on the porous
silicon with graphene embedded for the sensing improvement on the
non-reactive molecules
Abstract
A high-sensitivity double-roughness-structure (DRS) and its innovative
manufacturing processes are originally proposed for the improvement on
the sensing of the non-reactive molecule. The nitrogen molecules are
served as the non-reactive test target in the study. In the DRS, the
high roughness graphene is embedded into/onto the roughness surface of
the porous silicon, and such the porous silicon is specially made by the
“bottom-hole assisted approach” to get high-quality films. It is
proved that the DRS reveals the double reinforcement on the improvement
of the sensitivity based on the high surface-to-volume ratio in the
sensing on non-reactive molecules.