This paper presents a monolithic, inexpensive, label free, robust pH sensor that can be fabricated in an unmodified CMOS process. The sensor uses a differential p-ISFET architecture which substantially reduces non-ideal common mode effects which corrupt readout in ISFET based pH sensors and occupy only a small footprint. Additionally, the design offers the capability to correct for drift through control of the n-well voltage, which has not been demonstrated previously. We present results obtained from testing the sensor that is fabricated in the AMS 0.35μm process, including a demonstration of the drift correction. We demonstrate a differential sensitivity of 15 mV/pH over the entire pH range, with the ability to remove the already small drift of 0.1 mV/min using the bulk-source voltage adjustment.

This paper presents a monolithic, cost-effective, label free, low power, robust 3x2 fully differential ISFET pixel array aimed at pH sensing. Each pixel is based on a differential readout architecture which eliminates need for additional non-ideality compensation circuitry. Additionally, the design offers the capability to correct for residual drift and trapped charge offset through substrate-based voltage adjustment during calibration. The design also provides a unique ability for selecting pH sensitivity according to the desired mode of operation which has not been demonstrated previously. We present experimental results obtained from the pixel array fabricated in an unmodified AMS 0.35μm CMOS process using a 3.3V power supply. Each pixel demonstrates a differential sensitivity of 61mV/pH when operated in high sensitivity mode and 25mV/pH when operated in high non-ideality rejection mode over the entire pH range, with the ability to remove the already small drift of 0.3 mV/min and any offset mismatch by adjusting the substrate voltage