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Jan-Willem Burssens
Public Documents
2
Dual-Ring Method: Lateral Piezoelectric Coefficient (e31,f) Measurement on Unstructur...
Jan-Willem Burssens
October 31, 2023
 This work has been submitted to the IEEE for possible publication. Copyright may be transferred without notice, after which this version may no longer be accessible.Â
STUDY ON THE POLAR ORIENTATION OF PLASMA-DEPOSITED PIEZOELECTRIC MATERIALS
Jan-Willem Burssens
October 25, 2023
Introduction of a new model to explain the orientation of piezoelectrical materials during sputter deposition processes