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Hybrid TLM-CTLM Test Structure for Determining Specific Contact Resistivity of Ohmic Contacts
  • Pan Yue,
  • Thanh Pham Chi,
  • Anthony Holland
Pan Yue
RMIT University School of Engineering
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Thanh Pham Chi
RMIT International University School of Science Engineering and Technology

Corresponding Author:[email protected]

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Anthony Holland
RMIT University School of Engineering
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Abstract

Various test structures can be used to determine the specific contact resistivity of ohmic contacts. The transmission line model test structure and circular transmission line model test structure are the most commonly used. The analytical expressions of the former are straightforward and effectively describe the electrical behavior of a contact, while the concentric geometry of the latter eliminates complications during fabrication. In this paper, we present a hybrid test structure that combines the advantages of the transmission line and the circular transmission line models. The analytical expressions of the new structure are presented, and its finite-element modeling is undertaken. The effect of contact geometry on this test structure is also discussed. Using the presented test structure, determining contact parameters does not require any error corrections.
18 Jul 2024Submitted to International Journal of Numerical Modelling: Electronic Networks, Devices and Fields
18 Jul 2024Submission Checks Completed
18 Jul 2024Assigned to Editor
18 Jul 2024Review(s) Completed, Editorial Evaluation Pending
22 Jul 2024Reviewer(s) Assigned
01 Oct 2024Editorial Decision: Revise Major
04 Oct 20241st Revision Received
06 Oct 2024Submission Checks Completed
06 Oct 2024Assigned to Editor
06 Oct 2024Review(s) Completed, Editorial Evaluation Pending
06 Oct 2024Reviewer(s) Assigned
10 Oct 2024Editorial Decision: Accept