Phased array systems have become paramount to the development of next generation wireless communication networks, with errors on phase shifters contributing to beam pointing error. Oscillation-based built-in self-testing (OBIST) of phase shifters may improve on this accuracy. We propose a single-ended oscillation-based test technique for passive RF phase shifters. The method uses a negative resistance oscillator topology, where the phase shifter is used to capacitively load the active negative resistance circuit resulting in a dependency between relative phase shift and output oscillation frequency. Simulation results indicate an average sensitivity of 0.14 MHz/° of phase shift around a nominal 617 MHz output oscillation when testing an X-band reflection-type phase shifter, while the addition of OBT circuitry increases the phase shifter’s mid-band insertion loss by 0.93 dB.

We investigate the effect of passivation contouring, surface roughness, and sidewall etch tapering on the FEM modelling accuracy of mm-wave couplers in CMOS BEOL. It is found that accurate passivation contouring leads to a marginal improvement of 0.15 dB in peak coupling prediction accuracy, but introducing a sidewall taper of 104ᵒ can improve the prediction of peak coupling by up to 0.37 dB. Including surface roughness of 5 % and 10 % of metal thickness did not have a notable improvement on prediction of peak coupling.